Buffered Oxide Etchants
Buffered Oxide Etchant (17697)
13:2 VLSI Puranal
Overview
Specifications
General Information
- Grade
- VLSI
Physical Properties
- Vapor Pressure
- similar to water hectopascal
- Boiling Point/Range
- No data available
- Flashpoint
- Not applicable
- Odor
- Stinging
- Physical Form
- Liquid
- Partition Coefficient
- No data available
- pH
- Acidic
- Color
- Colorless
- Density
- 1.120 g/cm3 (20 °C)
- Melting Point/Range
- No data available
Safety Information
- Oxidizing
- The substance or mixture is not classified as oxidizing.
- Corrosivity
- Corrosive to metals
- Flammability
- Not applicable
- Thermal Decomposition
- No decomposition if used as directed.
- Self Ignition
- Not auto-flammable
- Chemical Stability
- Stable under normal conditions.
- Incompatible Materials
- Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metals, Glass and silicate-containing materials are attacked
- Ignition Temperature
- Not applicable
International Transportation
- UN Number
- 3264
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
General Information
- Grade
- VLSI
Physical Properties
- Vapor Pressure
- similar to water hectopascal
- Boiling Point/Range
- No data available
- Flashpoint
- Not applicable
- Odor
- Stinging
- Physical Form
- Liquid
- Partition Coefficient
- No data available
- pH
- Acidic
- Color
- Colorless
- Density
- 1.120 g/cm3 (20 °C)
- Melting Point/Range
- No data available
Safety Information
- Oxidizing
- The substance or mixture is not classified as oxidizing.
- Corrosivity
- Corrosive to metals
- Flammability
- Not applicable
- Thermal Decomposition
- No decomposition if used as directed.
- Self Ignition
- Not auto-flammable
- Chemical Stability
- Stable under normal conditions.
- Incompatible Materials
- Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metals, Glass and silicate-containing materials are attacked
- Ignition Temperature
- Not applicable
International Transportation
- UN Number
- 3264
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- Grade : VLSI
- Vapor Pressure : similar to water hectopascal
- Boiling Point/Range : No data available
- Flashpoint : Not applicable
- Odor : Stinging
- Physical Form : Liquid
- Partition Coefficient : No data available
- pH : Acidic
- Color : Colorless
- Density : 1.120 g/cm3 (20 °C)
- Melting Point/Range : No data available
- Oxidizing : The substance or mixture is not classified as oxidizing.
- Corrosivity : Corrosive to metals
- Flammability : Not applicable
- Thermal Decomposition : No decomposition if used as directed.
- Self Ignition : Not auto-flammable
- Chemical Stability : Stable under normal conditions.
- Incompatible Materials : Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metals, Glass and silicate-containing materials are attacked
- Ignition Temperature : Not applicable
- UN Number : 3264
- Chemical Class : 8
- Harmonized System Code : 38249996
- Packing Group : II
Property
Value
particles > 1 µm
Max. 20 P/ml
assay hydrofluoric acid (HF)
6.57 - 6.73 %
ammonium fluoride (NH4F)
34.8 - 35.6 %
residue on ignition (SO4)
Max. 10 ppm
silver (Ag)
Max. 0.05 ppm
aluminium (Al)
Max. 0.05 ppm
arsenic, antimony (as As)
Max. 0.01 ppm
gold (Au)
Max. 0.05 ppm
boron (B)
Max. 0.05 ppm
barium (Ba)
Max. 0.50 ppm
beryllium (Be)
Max. 0.50 ppm
bismuth (Bi)
Max. 0.50 ppm
calcium (Ca)
Max. 0.05 ppm
cadmium (Cd)
Max. 0.50 ppm
cobalt (Co)
Max. 0.50 ppm
chromium (Cr)
Max. 0.05 ppm
copper (Cu)
Max. 0.05 ppm
iron (Fe)
Max. 0.20 ppm
gallium (Ga)
Max. 0.05 ppm
germanium (Ge)
Max. 0.05 ppm
potassium (K)
Max. 0.05 ppm
lithium (Li)
Max. 0.05 ppm
magnesium (Mg)
Max. 0.05 ppm
manganese (Mn)
Max. 0.05 ppm
molybdenum (Mo)
Max. 0.50 ppm
sodium (Na)
Max. 0.05 ppm
niobium (Nb)
Max. 0.50 ppm
nickel (Ni)
Max. 0.05 ppm
lead (Pb)
Max. 0.05 ppm
tin (Sn)
Max. 0.05 ppm
strontium (Sr)
Max. 0.05 ppm
tantalum (Ta)
Max. 0.50 ppm
titanium (Ti)
Max. 0.05 ppm
thallium (Tl)
Max. 0.50 ppm
vanadium (V)
Max. 0.50 ppm
zinc (Zn)
Max. 0.05 ppm
zirconium (Zr)
Max. 0.50 ppm
chloride (Cl)
Max. 2 ppm
nitrate (NO3)
Max. 3 ppm
phosphate (PO4)
Max. 0.40 ppm
sulfate (SO4)
Max. 0.40 ppm
APHA
Max. 10
