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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (21470)

AF 95-5 (20:1) ULSI

Overview
Specifications

General Information

  • Grade
    • ULSI

Physical Properties

  • Boiling Point/Range
    • 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.110 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Odorless
  • pH
    • Acidic
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922

General Information

  • Grade
    • ULSI

Physical Properties

  • Boiling Point/Range
    • 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.110 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Odorless
  • pH
    • Acidic
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • Sub Class 1
    • 6.1
  • UN Number
    • 2922
  • Grade : ULSI
  • Boiling Point/Range : 100 °C (1,013 hPa)
  • Solubility in Water : Completely miscible
  • Physical Form : Liquid
  • Odor : Odorless
  • Color : Colorless
  • Flashpoint : Not applicable
  • pH : Acidic
  • Melting Point/Range : No data available
  • Density : 1.110 g/cm3 (20 °C)
  • Ignition Temperature : Not applicable
  • Corrosivity : Corrosive to metals
  • Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
  • Chemical Stability : Stable under normal conditions.
  • UN Number : 2922
  • Packing Group : II
  • Sub Class 1 : 6.1
  • Harmonized System Code : 38249996
  • Chemical Class : 8