Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17772)
AF 89-11 (17:2) VLSI Puranal
Overview
Specifications
General Information
- Grade
- VLSI
Physical Properties
- Physical Form
- Liquid
- Melting Point/Range
- No data available
- Flashpoint
- Not applicable
- Odor
- Odorless
- Boiling Point/Range
- No data available
- pH
- Acidic
- Color
- Colorless
- Density
- 1.11 g/cm3 (20 °C)
Safety Information
- Incompatible Materials
- Corrosive in contact with metals, Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride
- Chemical Stability
- Stable under normal conditions.
- Ignition Temperature
- Not applicable
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- UN Number
- 3264
- Harmonized System Code
- 38249996
- Chemical Class
- 8
- Packing Group
- II
General Information
- Grade
- VLSI
Physical Properties
- Physical Form
- Liquid
- Melting Point/Range
- No data available
- Flashpoint
- Not applicable
- Odor
- Odorless
- Boiling Point/Range
- No data available
- pH
- Acidic
- Color
- Colorless
- Density
- 1.11 g/cm3 (20 °C)
Safety Information
- Incompatible Materials
- Corrosive in contact with metals, Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride
- Chemical Stability
- Stable under normal conditions.
- Ignition Temperature
- Not applicable
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- UN Number
- 3264
- Harmonized System Code
- 38249996
- Chemical Class
- 8
- Packing Group
- II
- Grade : VLSI
- Physical Form : Liquid
- Melting Point/Range : No data available
- Flashpoint : Not applicable
- Odor : Odorless
- Boiling Point/Range : No data available
- pH : Acidic
- Color : Colorless
- Density : 1.11 g/cm3 (20 °C)
- Incompatible Materials : Corrosive in contact with metals, Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride
- Chemical Stability : Stable under normal conditions.
- Ignition Temperature : Not applicable
- Thermal Decomposition : No decomposition if used as directed.
- UN Number : 3264
- Harmonized System Code : 38249996
- Chemical Class : 8
- Packing Group : II
Property
Value
particles > 1 µm
Max. 512 P/ml
ammonium fluoride (NH4F)
34.50 - 35.50 %
assay hydrofluoric acid (HF)
5.32 - 5.48 %
silver (Ag)
Max. 0.1 ppm
aluminium (Al)
Max. 0.5 ppm
arsenic, antimony (as As)
Max. 0.05 ppm
gold (Au)
Max. 0.05 ppm
barium (Ba)
Max. 0.1 ppm
calcium (Ca)
Max. 0.5 ppm
cadmium (Cd)
Max. 0.1 ppm
cobalt (Co)
Max. 0.1 ppm
chromium (Cr)
Max. 0.1 ppm
copper (Cu)
Max. 0.1 ppm
iron (Fe)
Max. 0.5 ppm
gallium (Ga)
Max. 0.1 ppm
indium (In)
Max. 0.1 ppm
potassium (K)
Max. 0.1 ppm
lithium (Li)
Max. 0.1 ppm
magnesium (Mg)
Max. 0.5 ppm
manganese (Mn)
Max. 0.1 ppm
molybdenum (Mo)
Max. 0.1 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.1 ppm
lead (Pb)
Max. 0.5 ppm
platinum (Pt)
Max. 0.05 ppm
tin (Sn)
Max. 0.1 ppm
strontium (Sr)
Max. 0.1 ppm
titanium (Ti)
Max. 0.1 ppm
thallium (Tl)
Max. 0.05 ppm
zinc (Zn)
Max. 0.1 ppm
chloride (Cl)
Max. 4 ppm
phosphate (PO4)
Max. 0.2 ppm
sulfate (SO4)
Max. 2 ppm
