Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17750)
AWF 612-260-128 (BHF 6:1 Modified) LST, VLSI Puranal
Overview
Specifications
General Information
- Grade
- VLSI
- CAS Number
- 12125-01-8
Physical Properties
- Physical Form
- Liquid
- Density
- 1.088 g/cm3 (20 °C)
- Solubility
- Completely soluble
- Boiling Point/Range
- No data available
- Odor
- Odorless
- Color
- Colorless
- pH
- Acidic
- Melting Point/Range
- No data available
- Flashpoint
- Does not flash
Safety Information
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Chemical Stability
- Stable under normal conditions.
- Thermal Decomposition
- No decomposition if used as directed.
- Corrosivity
- Corrosive to metals
International Transportation
- Harmonized System Code
- 38249996
- Chemical Class
- 8
- UN Number
- 3264
- Packing Group
- II
General Information
- Grade
- VLSI
- CAS Number
- 12125-01-8
Physical Properties
- Physical Form
- Liquid
- Density
- 1.088 g/cm3 (20 °C)
- Solubility
- Completely soluble
- Boiling Point/Range
- No data available
- Odor
- Odorless
- Color
- Colorless
- pH
- Acidic
- Melting Point/Range
- No data available
- Flashpoint
- Does not flash
Safety Information
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Chemical Stability
- Stable under normal conditions.
- Thermal Decomposition
- No decomposition if used as directed.
- Corrosivity
- Corrosive to metals
International Transportation
- Harmonized System Code
- 38249996
- Chemical Class
- 8
- UN Number
- 3264
- Packing Group
- II
- Grade : VLSI
- CAS Number : 12125-01-8
- Physical Form : Liquid
- Density : 1.088 g/cm3 (20 °C)
- Solubility : Completely soluble
- Boiling Point/Range : No data available
- Odor : Odorless
- Color : Colorless
- pH : Acidic
- Melting Point/Range : No data available
- Flashpoint : Does not flash
- Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Chemical Stability : Stable under normal conditions.
- Thermal Decomposition : No decomposition if used as directed.
- Corrosivity : Corrosive to metals
- Harmonized System Code : 38249996
- Chemical Class : 8
- UN Number : 3264
- Packing Group : II
Property
Value
particles > 1 µm
Max. 10 P/ml
particles > 0,5 µm
Max. 100 P/ml
assay hydrofluoric acid (HF)
6.7 - 6.9 %
ammonium fluoride (NH4F)
24.5 - 25.5 %
surface tension
Max. 36 mN/m
silver (Ag)
Max. 0.05 ppm
aluminium (Al)
Max. 0.1 ppm
gold (Au)
Max. 0.05 ppm
boron (B)
Max. 0.02 ppm
barium (Ba)
Max. 0.1 ppm
calcium (Ca)
Max. 0.2 ppm
cadmium (Cd)
Max. 0.02 ppm
cobalt (Co)
Max. 0.02 ppm
chromium (Cr)
Max. 0.05 ppm
copper (Cu)
Max. 0.02 ppm
iron (Fe)
Max. 0.5 ppm
gallium (Ga)
Max. 0.05 ppm
germanium (Ge)
Max. 0.05 ppm
potassium (K)
Max. 0.2 ppm
lithium (Li)
Max. 0.05 ppm
magnesium (Mg)
Max. 0.2 ppm
manganese (Mn)
Max. 0.1 ppm
sodium (Na)
Max. 0.3 ppm
lead (Pb)
Max. 0.3 ppm
tin (Sn)
Max. 0.15 ppm
strontium (Sr)
Max. 0.1 ppm
titanium (Ti)
Max. 0.3 ppm
zinc (Zn)
Max. 0.1 ppm
chloride (Cl)
Max. 4 ppm
nitrate (NO3)
Max. 10 ppm
phosphate (PO4)
Max. 1 ppm
APHA
Max. 10
