Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17674)
AWF 610-275-115 VLSI Puranal
Overview
Specifications
General Information
- Grade
- VLSI
Physical Properties
- Color
- Colorless
- Density
- 1.080 g/cm3 (20 °C)
- pH
- 5.0 to 6.0 (20 °C)
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Physical Form
- Liquid
- Flashpoint
- Not applicable
- Odor
- Odorless
Safety Information
- Thermal Decomposition
- No decomposition if used as directed.
- Chemical Stability
- Stable under normal conditions.
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Corrosivity
- Corrosive to metals
International Transportation
- Chemical Class
- 8
- UN Number
- 3264
- Harmonized System Code
- 38249996
- Packing Group
- II
General Information
- Grade
- VLSI
Physical Properties
- Color
- Colorless
- Density
- 1.080 g/cm3 (20 °C)
- pH
- 5.0 to 6.0 (20 °C)
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Physical Form
- Liquid
- Flashpoint
- Not applicable
- Odor
- Odorless
Safety Information
- Thermal Decomposition
- No decomposition if used as directed.
- Chemical Stability
- Stable under normal conditions.
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Corrosivity
- Corrosive to metals
International Transportation
- Chemical Class
- 8
- UN Number
- 3264
- Harmonized System Code
- 38249996
- Packing Group
- II
- Grade : VLSI
- Color : Colorless
- Density : 1.080 g/cm3 (20 °C)
- pH : 5.0 to 6.0 (20 °C)
- Boiling Point/Range : > 100 °C (1,013 hPa)
- Physical Form : Liquid
- Flashpoint : Not applicable
- Odor : Odorless
- Thermal Decomposition : No decomposition if used as directed.
- Chemical Stability : Stable under normal conditions.
- Ignition Temperature : Not applicable
- Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Corrosivity : Corrosive to metals
- Chemical Class : 8
- UN Number : 3264
- Harmonized System Code : 38249996
- Packing Group : II
Property
Value
particles > 0,5 µm
Max. 250 P/ml
ammonium fluoride (NH4F)
24.5 - 25.5 %
assay hydrofluoric acid (HF)
6.1 - 6.3 %
etch rate (nm/min)
200 - 220 nm/min
residue on ignition (SO4)
Max. 10 ppm
silver (Ag)
Max. 0.01 ppm
aluminium (Al)
Max. 0.05 ppm
arsenic, antimony (as As)
Max. 0.03 ppm
gold (Au)
Max. 0.02 ppm
boron (B)
Max. 0.05 ppm
barium (Ba)
Max. 0.01 ppm
beryllium (Be)
Max. 0.01 ppm
bismuth (Bi)
Max. 0.02 ppm
calcium (Ca)
Max. 0.1 ppm
cadmium (Cd)
Max. 0.01 ppm
cobalt (Co)
Max. 0.01 ppm
chromium (Cr)
Max. 0.01 ppm
copper (Cu)
Max. 0.01 ppm
iron (Fe)
Max. 0.05 ppm
gallium (Ga)
Max. 0.01 ppm
germanium (Ge)
Max. 0.05 ppm
indium (In)
Max. 0.01 ppm
potassium (K)
Max. 0.05 ppm
lithium (Li)
Max. 0.01 ppm
magnesium (Mg)
Max. 0.05 ppm
manganese (Mn)
Max. 0.01 ppm
molybdenum (Mo)
Max. 0.01 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.01 ppm
lead (Pb)
Max. 0.01 ppm
platinum (Pt)
Max. 0.05 ppm
silicon (Si)
Max. 200 ppm
tin (Sn)
Max. 0.02 ppm
strontium (Sr)
Max. 0.01 ppm
titanium (Ti)
Max. 0.01 ppm
thallium (Tl)
Max. 0.02 ppm
vanadium (V)
Max. 0.01 ppm
zinc (Zn)
Max. 0.05 ppm
zirconium (Zr)
Max. 0.01 ppm
chloride (Cl)
Max. 4 ppm
nitrate (NO3)
Max. 3 ppm
phosphate (PO4)
Max. 0.2 ppm
sulfate (SO4)
Max. 2 ppm
