Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17621)
AF 875-125 VLSI Puranal 250
Overview
Specifications
General Information
- Grade
- VLSI
Physical Properties
- Physical Form
- Liquid
- Odor
- Stinging
- Color
- Colorless
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- pH
- Acidic
- Density
- 1.110 g/cm3 (20 °C)
- Boiling Point/Range
- No data available
Safety Information
- Ignition Temperature
- Not applicable
- Corrosivity
- Corrosive to metals
- Chemical Stability
- Stable under normal conditions.
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 8
- Packing Group
- II
- Harmonized System Code
- 38249996
- UN Number
- 3264
General Information
- Grade
- VLSI
Physical Properties
- Physical Form
- Liquid
- Odor
- Stinging
- Color
- Colorless
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- pH
- Acidic
- Density
- 1.110 g/cm3 (20 °C)
- Boiling Point/Range
- No data available
Safety Information
- Ignition Temperature
- Not applicable
- Corrosivity
- Corrosive to metals
- Chemical Stability
- Stable under normal conditions.
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 8
- Packing Group
- II
- Harmonized System Code
- 38249996
- UN Number
- 3264
- Grade : VLSI
- Physical Form : Liquid
- Odor : Stinging
- Color : Colorless
- Flashpoint : Not applicable
- Melting Point/Range : No data available
- pH : Acidic
- Density : 1.110 g/cm3 (20 °C)
- Boiling Point/Range : No data available
- Ignition Temperature : Not applicable
- Corrosivity : Corrosive to metals
- Chemical Stability : Stable under normal conditions.
- Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Thermal Decomposition : No decomposition if used as directed.
- Chemical Class : 8
- Packing Group : II
- Harmonized System Code : 38249996
- UN Number : 3264
Property
Value
particles > 0,5 µm
Max. 250 P/ml
ammonium fluoride (NH4F)
33.8 - 35.8 %
assay hydrofluoric acid (HF)
6.2 - 6.6 %
residue on ignition (SO4)
Max. 10 ppm
silver (Ag)
Max. 0.01 ppm
aluminium (Al)
Max. 0.05 ppm
arsenic, antimony (as As)
Max. 0.03 ppm
gold (Au)
Max. 0.02 ppm
boron (B)
Max. 0.05 ppm
barium (Ba)
Max. 0.01 ppm
beryllium (Be)
Max. 0.01 ppm
bismuth (Bi)
Max. 0.02 ppm
calcium (Ca)
Max. 0.1 ppm
cadmium (Cd)
Max. 0.01 ppm
cobalt (Co)
Max. 0.01 ppm
chromium (Cr)
Max. 0.01 ppm
copper (Cu)
Max. 0.01 ppm
iron (Fe)
Max. 0.05 ppm
gallium (Ga)
Max. 0.01 ppm
germanium (Ge)
Max. 0.05 ppm
indium (In)
Max. 0.01 ppm
potassium (K)
Max. 0.05 ppm
lithium (Li)
Max. 0.01 ppm
magnesium (Mg)
Max. 0.05 ppm
manganese (Mn)
Max. 0.01 ppm
molybdenum (Mo)
Max. 0.01 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.01 ppm
lead (Pb)
Max. 0.01 ppm
platinum (Pt)
Max. 0.05 ppm
silicon (Si)
Max. 200 ppm
tin (Sn)
Max. 0.02 ppm
strontium (Sr)
Max. 0.01 ppm
titanium (Ti)
Max. 0.01 ppm
thallium (Tl)
Max. 0.02 ppm
vanadium (V)
Max. 0.01 ppm
zinc (Zn)
Max. 0.05 ppm
zirconium (Zr)
Max. 0.01 ppm
chloride (Cl)
Max. 4 ppm
phosphate (PO4)
Max. 0.2 ppm
sulfate (SO4)
Max. 2 ppm
