Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17567)
AFW 68-20(48)-12 MOS Puranal
Overview
Specifications
General Information
- Grade
- SemEG
Physical Properties
- Density
- 1.110 g/cm3 (20 °C)
- Melting Point/Range
- No data available
- pH
- Acidic
- Flashpoint
- Not applicable
- Odor
- Odorless
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Color
- Colorless
- Physical Form
- Liquid
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Thermal Decomposition
- No decomposition if used as directed.
- Ignition Temperature
- Not applicable
International Transportation
- Packing Group
- II
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- UN Number
- 3264
General Information
- Grade
- SemEG
Physical Properties
- Density
- 1.110 g/cm3 (20 °C)
- Melting Point/Range
- No data available
- pH
- Acidic
- Flashpoint
- Not applicable
- Odor
- Odorless
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Color
- Colorless
- Physical Form
- Liquid
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Thermal Decomposition
- No decomposition if used as directed.
- Ignition Temperature
- Not applicable
International Transportation
- Packing Group
- II
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- UN Number
- 3264
- Grade : SemEG
- Density : 1.110 g/cm3 (20 °C)
- Melting Point/Range : No data available
- pH : Acidic
- Flashpoint : Not applicable
- Odor : Odorless
- Boiling Point/Range : > 100 °C (1,013 hPa)
- Color : Colorless
- Physical Form : Liquid
- Chemical Stability : Stable under normal conditions.
- Corrosivity : Corrosive to metals
- Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Thermal Decomposition : No decomposition if used as directed.
- Ignition Temperature : Not applicable
- Packing Group : II
- Chemical Class : 8
- Harmonized System Code : 38249996
- UN Number : 3264
Property
Value
particlecl.acc.to NAS 1638
Max. 2
ammonium fluoride (NH4F)
26.4 - 28.4 %
assay hydrofluoric acid (HF)
9.3 - 10.3 %
residue on ignition (SO4)
Max. 20 ppm
arsenic (As)
Max. 0.1 ppm
calcium (Ca)
Max. 0.5 ppm
cadmium (Cd)
Max. 0.1 ppm
cobalt (Co)
Max. 0.1 ppm
copper (Cu)
Max. 0.1 ppm
iron (Fe)
Max. 1 ppm
potassium (K)
Max. 0.1 ppm
lithium (Li)
Max. 0.1 ppm
magnesium (Mg)
Max. 0.2 ppm
manganese (Mn)
Max. 0.1 ppm
sodium (Na)
Max. 0.5 ppm
nickel (Ni)
Max. 0.1 ppm
lead (Pb)
Max. 0.1 ppm
strontium (Sr)
Max. 0.1 ppm
zinc (Zn)
Max. 0.1 ppm
chloride (Cl)
Max. 4 ppm
phosphate (PO4)
Max. 1 ppm
sulfate (SO4)
Max. 5 ppm
