Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17381)
AF 95-5 (20:1) LST ULSI Puranal
Overview
Specifications
General Information
- Grade
- ULSI
- CAS Number
- 12125-01-8
Physical Properties
- Physical Form
- Liquid
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Odorless
- Color
- Colorless
- Density
- 1.110 g/cm3 (20 °C)
- pH
- Acidic
Safety Information
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Chemical Stability
- Stable under normal conditions.
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- UN Number
- 2922
- Chemical Class
- 8
- Packing Group
- II
- Sub Class 1
- 6.1
- Harmonized System Code
- 38249996
General Information
- Grade
- ULSI
- CAS Number
- 12125-01-8
Physical Properties
- Physical Form
- Liquid
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Odorless
- Color
- Colorless
- Density
- 1.110 g/cm3 (20 °C)
- pH
- Acidic
Safety Information
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Chemical Stability
- Stable under normal conditions.
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- UN Number
- 2922
- Chemical Class
- 8
- Packing Group
- II
- Sub Class 1
- 6.1
- Harmonized System Code
- 38249996
- Grade : ULSI
- CAS Number : 12125-01-8
- Physical Form : Liquid
- Boiling Point/Range : 100 °C (1,013 hPa)
- Flashpoint : Not applicable
- Melting Point/Range : No data available
- Odor : Odorless
- Color : Colorless
- Density : 1.110 g/cm3 (20 °C)
- pH : Acidic
- Corrosivity : Corrosive to metals
- Ignition Temperature : Not applicable
- Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Chemical Stability : Stable under normal conditions.
- Thermal Decomposition : No decomposition if used as directed.
- UN Number : 2922
- Chemical Class : 8
- Packing Group : II
- Sub Class 1 : 6.1
- Harmonized System Code : 38249996
Property
Value
particles > 0,5 µm
Max. 170 P/ml
ammonium fluoride (NH4F)
37.5 - 38.5 %
assay hydrofluoric acid (HF)
2.3 - 2.5 %
surface tension
Max. 37 mN/m
residue on ignition (SO4)
Max. 40 ppm
silver (Ag)
Max. 2 ppb
aluminium (Al)
Max. 10 ppb
arsenic, antimony (as As)
Max. 0.05 ppm
gold (Au)
Max. 2 ppb
barium (Ba)
Max. 100 ppb
bismuth (Bi)
Max. 100 ppb
calcium (Ca)
Max. 10 ppb
cadmium (Cd)
Max. 100 ppb
cobalt (Co)
Max. 100 ppb
chromium (Cr)
Max. 5 ppb
copper (Cu)
Max. 5 ppb
iron (Fe)
Max. 10 ppb
gallium (Ga)
Max. 100 ppb
indium (In)
Max. 100 ppb
potassium (K)
Max. 10 ppb
lithium (Li)
Max. 2 ppb
magnesium (Mg)
Max. 10 ppb
manganese (Mn)
Max. 100 ppb
molybdenum (Mo)
Max. 100 ppb
sodium (Na)
Max. 10 ppb
nickel (Ni)
Max. 10 ppb
lead (Pb)
Max. 500 ppb
platinum (Pt)
Max. 50 ppb
tin (Sn)
Max. 100 ppb
strontium (Sr)
Max. 100 ppb
titanium (Ti)
Max. 100 ppb
thallium (Tl)
Max. 50 ppb
zinc (Zn)
Max. 5 ppb
chloride (Cl)
Max. 4 ppm
phosphate (PO4)
Max. 0.2 ppm
sulfate (SO4)
Max. 6 ppm
