Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17323)
AF 91-9, ULSI Puranal (BOE 10:1)
Overview
Specifications
General Information
- Grade
- ULSI
Physical Properties
- Flashpoint
- Not applicable
- Odor
- Stinging
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Physical Form
- Liquid
- Melting Point/Range
- No data available
- pH
- Acidic
- Density
- 1.120 g/cm3 (20 °C)
- Color
- Colorless
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
International Transportation
- Harmonized System Code
- 38249996
- Packing Group
- II
- UN Number
- 3264
- Chemical Class
- 8
General Information
- Grade
- ULSI
Physical Properties
- Flashpoint
- Not applicable
- Odor
- Stinging
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Physical Form
- Liquid
- Melting Point/Range
- No data available
- pH
- Acidic
- Density
- 1.120 g/cm3 (20 °C)
- Color
- Colorless
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
International Transportation
- Harmonized System Code
- 38249996
- Packing Group
- II
- UN Number
- 3264
- Chemical Class
- 8
- Grade : ULSI
- Flashpoint : Not applicable
- Odor : Stinging
- Boiling Point/Range : 100 °C (1,013 hPa)
- Physical Form : Liquid
- Melting Point/Range : No data available
- pH : Acidic
- Density : 1.120 g/cm3 (20 °C)
- Color : Colorless
- Chemical Stability : Stable under normal conditions.
- Corrosivity : Corrosive to metals
- Ignition Temperature : Not applicable
- Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Harmonized System Code : 38249996
- Packing Group : II
- UN Number : 3264
- Chemical Class : 8
Property
Value
particles > 0,2 µm
Max. 250 P/ml
particles > 0,5 µm
Max. 30 P/ml
ammonium fluoride (NH4F)
35.7 - 36.3 %
assay hydrofluoric acid (HF)
4.5 - 4.7 %
aluminium (Al)
Max. 10 ppb
calcium (Ca)
Max. 10 ppb
iron (Fe)
Max. 10 ppb
potassium (K)
Max. 10 ppb
sodium (Na)
Max. 10 ppb
zinc (Zn)
Max. 10 ppb
