Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17262)
AF 970-30 VLSI Puranal
Overview
Specifications
General Information
- Grade
- VLSI
Physical Properties
- Melting Point/Range
- No data available
- Density
- 1.110 g/cm3 (20 °C)
- Odor
- Weak
- Flashpoint
- Not applicable
- pH
- Acidic
- Physical Form
- Liquid
- Color
- Colorless
- Boiling Point/Range
- 100 °C (1,013 hPa)
Safety Information
- Thermal Decomposition
- No decomposition if used as directed.
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Ignition Temperature
- Not applicable
- Corrosivity
- Corrosive to metals
- Chemical Stability
- Stable under normal conditions.
International Transportation
- Chemical Class
- 8
- Packing Group
- II
- Harmonized System Code
- 38249996
- UN Number
- 2922
- Sub Class 1
- 6.1
General Information
- Grade
- VLSI
Physical Properties
- Melting Point/Range
- No data available
- Density
- 1.110 g/cm3 (20 °C)
- Odor
- Weak
- Flashpoint
- Not applicable
- pH
- Acidic
- Physical Form
- Liquid
- Color
- Colorless
- Boiling Point/Range
- 100 °C (1,013 hPa)
Safety Information
- Thermal Decomposition
- No decomposition if used as directed.
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Ignition Temperature
- Not applicable
- Corrosivity
- Corrosive to metals
- Chemical Stability
- Stable under normal conditions.
International Transportation
- Chemical Class
- 8
- Packing Group
- II
- Harmonized System Code
- 38249996
- UN Number
- 2922
- Sub Class 1
- 6.1
- Grade : VLSI
- Melting Point/Range : No data available
- Density : 1.110 g/cm3 (20 °C)
- Odor : Weak
- Flashpoint : Not applicable
- pH : Acidic
- Physical Form : Liquid
- Color : Colorless
- Boiling Point/Range : 100 °C (1,013 hPa)
- Thermal Decomposition : No decomposition if used as directed.
- Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Ignition Temperature : Not applicable
- Corrosivity : Corrosive to metals
- Chemical Stability : Stable under normal conditions.
- Chemical Class : 8
- Packing Group : II
- Harmonized System Code : 38249996
- UN Number : 2922
- Sub Class 1 : 6.1
Property
Value
particles > 5 µm
Max. 35 P/ml
ammonium fluoride (NH4F)
37.50 - 40.00 %
assay hydrofluoric acid (HF)
1.6 - 1.8 %
residue on ignition (SO4)
Max. 40 ppm
silver (Ag)
Max. 0.1 ppm
aluminium (Al)
Max. 0.5 ppm
arsenic, antimony (as As)
Max. 0.05 ppm
gold (Au)
Max. 0.05 ppm
barium (Ba)
Max. 0.1 ppm
bismuth (Bi)
Max. 0.1 ppm
calcium (Ca)
Max. 0.5 ppm
cadmium (Cd)
Max. 0.1 ppm
cobalt (Co)
Max. 0.1 ppm
chromium (Cr)
Max. 0.1 ppm
copper (Cu)
Max. 0.1 ppm
iron (Fe)
Max. 0.5 ppm
gallium (Ga)
Max. 0.1 ppm
indium (In)
Max. 0.1 ppm
potassium (K)
Max. 0.1 ppm
lithium (Li)
Max. 0.1 ppm
magnesium (Mg)
Max. 0.5 ppm
manganese (Mn)
Max. 0.1 ppm
molybdenum (Mo)
Max. 0.1 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.1 ppm
lead (Pb)
Max. 0.5 ppm
platinum (Pt)
Max. 0.05 ppm
tin (Sn)
Max. 0.1 ppm
strontium (Sr)
Max. 0.1 ppm
titanium (Ti)
Max. 0.1 ppm
thallium (Tl)
Max. 0.05 ppm
zinc (Zn)
Max. 0.1 ppm
chloride (Cl)
Max. 4 ppm
phosphate (PO4)
Max. 0.2 ppm
sulfate (SO4)
Max. 2 ppm
