Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17256)
AF 91-9 VLSI Puranal
Overview
Specifications
General Information
- Grade
- VLSI
Physical Properties
- Density
- 1.120 g/cm3 (20 °C)
- Melting Point/Range
- No data available
- Physical Form
- Liquid
- Color
- Colorless
- pH
- Acidic
- Odor
- Stinging
- Flashpoint
- Not applicable
- Boiling Point/Range
- 100 °C (1,013 hPa)
Safety Information
- Corrosivity
- Corrosive to metals
- Chemical Stability
- Stable under normal conditions.
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Ignition Temperature
- Not applicable
International Transportation
- Harmonized System Code
- 38249996
- Chemical Class
- 8
- UN Number
- 3264
- Packing Group
- II
General Information
- Grade
- VLSI
Physical Properties
- Density
- 1.120 g/cm3 (20 °C)
- Melting Point/Range
- No data available
- Physical Form
- Liquid
- Color
- Colorless
- pH
- Acidic
- Odor
- Stinging
- Flashpoint
- Not applicable
- Boiling Point/Range
- 100 °C (1,013 hPa)
Safety Information
- Corrosivity
- Corrosive to metals
- Chemical Stability
- Stable under normal conditions.
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Ignition Temperature
- Not applicable
International Transportation
- Harmonized System Code
- 38249996
- Chemical Class
- 8
- UN Number
- 3264
- Packing Group
- II
- Grade : VLSI
- Density : 1.120 g/cm3 (20 °C)
- Melting Point/Range : No data available
- Physical Form : Liquid
- Color : Colorless
- pH : Acidic
- Odor : Stinging
- Flashpoint : Not applicable
- Boiling Point/Range : 100 °C (1,013 hPa)
- Corrosivity : Corrosive to metals
- Chemical Stability : Stable under normal conditions.
- Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Ignition Temperature : Not applicable
- Harmonized System Code : 38249996
- Chemical Class : 8
- UN Number : 3264
- Packing Group : II
Property
Value
particles > 0,5 µm
Max. 2000 P/ml
ammonium fluoride (NH4F)
35.2 - 37.2 %
assay hydrofluoric acid (HF)
4.5 - 4.8 %
silver (Ag)
Max. 0.5 ppm
gold (Au)
Max. 0.1 ppm
barium (Ba)
Max. 0.1 ppm
bismuth (Bi)
Max. 0.1 ppm
calcium (Ca)
Max. 0.5 ppm
cadmium (Cd)
Max. 0.1 ppm
cobalt (Co)
Max. 0.1 ppm
chromium (Cr)
Max. 0.1 ppm
copper (Cu)
Max. 0.1 ppm
iron (Fe)
Max. 0.5 ppm
gallium (Ga)
Max. 0.1 ppm
indium (In)
Max. 0.1 ppm
potassium (K)
Max. 0.1 ppm
lithium (Li)
Max. 0.1 ppm
magnesium (Mg)
Max. 0.5 ppm
manganese (Mn)
Max. 0.1 ppm
molybdenum (Mo)
Max. 0.1 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.1 ppm
lead (Pb)
Max. 0.5 ppm
platinum (Pt)
Max. 0.1 ppm
tin (Sn)
Max. 0.1 ppm
strontium (Sr)
Max. 0.1 ppm
titanium (Ti)
Max. 0.1 ppm
thallium (Tl)
Max. 0.05 ppm
zinc (Zn)
Max. 0.1 ppm
chloride (Cl)
Max. 4 ppm
phosphate (PO4)
Max. 0.2 ppm
sulfate (SO4)
Max. 2 ppm
