Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17053)
AF 90-10 ULSI Puranal
Overview
Specifications
General Information
- Grade
- ULSI
Physical Properties
- Melting Point/Range
- No data available
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- pH
- Acidic
- Physical Form
- Liquid
- Flashpoint
- Not applicable
- Density
- 1.115 g/cm3 (20 °C)
- Odor
- Stinging
- Color
- Colorless
Safety Information
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Corrosivity
- Corrosive to metals
- Chemical Stability
- Stable under normal conditions.
- Thermal Decomposition
- No decomposition if used as directed.
- Ignition Temperature
- Not applicable
International Transportation
- Harmonized System Code
- 38249996
- Packing Group
- II
- Chemical Class
- 8
- UN Number
- 3264
General Information
- Grade
- ULSI
Physical Properties
- Melting Point/Range
- No data available
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- pH
- Acidic
- Physical Form
- Liquid
- Flashpoint
- Not applicable
- Density
- 1.115 g/cm3 (20 °C)
- Odor
- Stinging
- Color
- Colorless
Safety Information
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Corrosivity
- Corrosive to metals
- Chemical Stability
- Stable under normal conditions.
- Thermal Decomposition
- No decomposition if used as directed.
- Ignition Temperature
- Not applicable
International Transportation
- Harmonized System Code
- 38249996
- Packing Group
- II
- Chemical Class
- 8
- UN Number
- 3264
- Grade : ULSI
- Melting Point/Range : No data available
- Boiling Point/Range : > 100 °C (1,013 hPa)
- pH : Acidic
- Physical Form : Liquid
- Flashpoint : Not applicable
- Density : 1.115 g/cm3 (20 °C)
- Odor : Stinging
- Color : Colorless
- Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Corrosivity : Corrosive to metals
- Chemical Stability : Stable under normal conditions.
- Thermal Decomposition : No decomposition if used as directed.
- Ignition Temperature : Not applicable
- Harmonized System Code : 38249996
- Packing Group : II
- Chemical Class : 8
- UN Number : 3264
Property
Value
assay of NH4F
35.3 - 36.3 %
assay hydrofluoric acid (HF)
5.1 - 5.5 %
silver (Ag)
Max. 10 ppb
aluminium (Al)
Max. 10 ppb
arsenic, antimony (as As)
Max. 10 ppb
gold (Au)
Max. 10 ppb
barium (Ba)
Max. 20 ppb
beryllium (Be)
Max. 20 ppb
bismuth (Bi)
Max. 20 ppb
calcium (Ca)
Max. 10 ppb
cadmium (Cd)
Max. 20 ppb
cobalt (Co)
Max. 10 ppb
chromium (Cr)
Max. 5 ppb
copper (Cu)
Max. 5 ppb
iron (Fe)
Max. 5 ppb
gallium (Ga)
Max. 10 ppb
germanium (Ge)
Max. 10 ppb
potassium (K)
Max. 5 ppb
lithium (Li)
Max. 10 ppb
magnesium (Mg)
Max. 10 ppb
manganese (Mn)
Max. 10 ppb
molybdenum (Mo)
Max. 10 ppb
sodium (Na)
Max. 5 ppb
niobium (Nb)
Max. 20 ppb
nickel (Ni)
Max. 10 ppb
lead (Pb)
Max. 10 ppb
tin (Sn)
Max. 10 ppb
strontium (Sr)
Max. 10 ppb
tantalum (Ta)
Max. 20 ppb
titanium (Ti)
Max. 10 ppb
thallium (Tl)
Max. 20 ppb
vanadium (V)
Max. 10 ppb
zinc (Zn)
Max. 5 ppb
zirconium (Zr)
Max. 10 ppb
chloride (Cl)
Max. 2 ppm
nitrate (NO3)
Max. 0.8 ppm
phosphate (PO4)
Max. 0.6 ppm
sulfate (SO4)
Max. 1.5 ppm
