Spin-on Dopant (SOD)
ACCUSPIN® B-75X
Boron Spin-on Dopant
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ACCUSPIN B-XXX materials provide a lower cost of ownership than other dopant sources and reduce the need for costly diffusion furnace tube cleaning or replacement, required when using gas or liquid boron dopants.
Because the B-XXX materials are Spin-on borosilicates or boron nitrogen, diffusion is more uniform during the drive-in process so sheet resistance and junction depths are repeatable. The use of a Spin-on process eliminates non-uniformity issues due to changes in gas flows of boron sources and differing boron sheet resistance from placement in the diffusion furnace.
A Spin-on process also increases diffusion furnace throughput because every wafer boat slot can be used for production wafers.
General Information
- Application
- Spin-on Dopant
- Brand
- ACCUSPIN®
General Information
- Application
- Spin-on Dopant
- Brand
- ACCUSPIN®
- Application : Spin-on Dopant
- Brand : ACCUSPIN®