Metal Etchants
Sulfuric Acid Etching Mixture (17279)
SlWS 219-565-216 VLSI Puranal
Overview
Specifications
General Information
- Grade
- VLSI
Physical Properties
- Color
- Colorless
- Odor
- Stinging
- Density
- 1.34 g/cm3 (20 °C)
- Physical Form
- Liquid
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Flashpoint
- Not applicable
- pH
- < 1
- Partition Coefficient
- No data available
Safety Information
- Thermal Decomposition
- No decomposition if used as directed.
- Incompatible Materials
- Corrosive in contact with metals, Hydrogen by reaction with metals
- Ignition Temperature
- Not applicable
- Corrosivity
- Corrosive to metals
International Transportation
- Packing Group
- II
- Chemical Class
- 8
- UN Number
- 3264
- Harmonized System Code
- 38249996
General Information
- Grade
- VLSI
Physical Properties
- Color
- Colorless
- Odor
- Stinging
- Density
- 1.34 g/cm3 (20 °C)
- Physical Form
- Liquid
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Flashpoint
- Not applicable
- pH
- < 1
- Partition Coefficient
- No data available
Safety Information
- Thermal Decomposition
- No decomposition if used as directed.
- Incompatible Materials
- Corrosive in contact with metals, Hydrogen by reaction with metals
- Ignition Temperature
- Not applicable
- Corrosivity
- Corrosive to metals
International Transportation
- Packing Group
- II
- Chemical Class
- 8
- UN Number
- 3264
- Harmonized System Code
- 38249996
- Grade : VLSI
- Color : Colorless
- Odor : Stinging
- Density : 1.34 g/cm3 (20 °C)
- Physical Form : Liquid
- Boiling Point/Range : > 100 °C (1,013 hPa)
- Flashpoint : Not applicable
- pH : < 1
- Partition Coefficient : No data available
- Thermal Decomposition : No decomposition if used as directed.
- Incompatible Materials : Corrosive in contact with metals, Hydrogen by reaction with metals
- Ignition Temperature : Not applicable
- Corrosivity : Corrosive to metals
- Packing Group : II
- Chemical Class : 8
- UN Number : 3264
- Harmonized System Code : 38249996
Property
Value
particles > 0,5 µm
Max. 250 P/ml
assay of HNO3
16.1 - 16.9 %
assay of H2SO4
29.9 - 30.7 %
silver (Ag)
Max. 0.01 ppm
aluminium (Al)
Max. 0.03 ppm
gold (Au)
Max. 0.01 ppm
barium (Ba)
Max. 0.05 ppm
beryllium (Be)
Max. 0.01 ppm
bismuth (Bi)
Max. 0.01 ppm
calcium (Ca)
Max. 0.1 ppm
cadmium (Cd)
Max. 0.01 ppm
cobalt (Co)
Max. 0.01 ppm
chromium (Cr)
Max. 0.01 ppm
copper (Cu)
Max. 0.01 ppm
iron (Fe)
Max. 0.1 ppm
gallium (Ga)
Max. 0.01 ppm
indium (In)
Max. 0.01 ppm
potassium (K)
Max. 0.05 ppm
lithium (Li)
Max. 0.01 ppm
magnesium (Mg)
Max. 0.05 ppm
manganese (Mn)
Max. 0.01 ppm
molybdenum (Mo)
Max. 0.01 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.01 ppm
lead (Pb)
Max. 0.01 ppm
platinum (Pt)
Max. 0.01 ppm
antimony (Sb)
Max. 0.01 ppm
tin (Sn)
Max. 0.01 ppm
strontium (Sr)
Max. 0.01 ppm
titanium (Ti)
Max. 0.02 ppm
thallium (Tl)
Max. 0.01 ppm
vanadium (V)
Max. 0.01 ppm
zinc (Zn)
Max. 0.03 ppm
zirconium (Zr)
Max. 0.01 ppm
chloride (Cl)
Max. 0.5 ppm
phosphate (PO4)
Max. 0.5 ppm
