Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17323)
AF 91-9, ULSI Puranal (BOE 10:1)
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Overview
Specifications
General Information
- Grade
- ULSI
- Synonyms
- Ammonium fluorure
- Etchant
Physical Properties
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.120 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Stinging
- pH
- Acidic
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
International Transportation
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- UN Number
- 3264
General Information
- Grade
- ULSI
- Synonyms
- Ammonium fluorure
- Etchant
Physical Properties
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.120 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Stinging
- pH
- Acidic
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
International Transportation
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- UN Number
- 3264
- Synonyms : Ammonium fluorure|Etchant
- Grade : ULSI
- Color : Colorless
- Flashpoint : Not applicable
- pH : Acidic
- Solubility in Water : Completely miscible
- Physical Form : Liquid
- Boiling Point/Range : 100 °C (1,013 hPa)
- Odor : Stinging
- Melting Point/Range : No data available
- Density : 1.120 g/cm3 (20 °C)
- Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
- Chemical Stability : Stable under normal conditions.
- Ignition Temperature : Not applicable
- Corrosivity : Corrosive to metals
- UN Number : 3264
- Chemical Class : 8
- Packing Group : II
- Harmonized System Code : 38249996
