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Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17063)
AWF 560-349-91 ULSI Puranal
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Overview
Specifications
General Information
- Grade
- ULSI
- Synonyms
- Ammonium fluorure
- Etchant
Physical Properties
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.080 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Odorless
- pH
- 5.0 to 6.0 (20 °C)
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- UN Number
- 3264
General Information
- Grade
- ULSI
- Synonyms
- Ammonium fluorure
- Etchant
Physical Properties
- Boiling Point/Range
- > 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.080 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Odorless
- pH
- 5.0 to 6.0 (20 °C)
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- UN Number
- 3264
- Synonyms : Ammonium fluorure|Etchant
- Grade : ULSI
- Flashpoint : Not applicable
- pH : 5.0 to 6.0 (20 °C)
- Odor : Odorless
- Melting Point/Range : No data available
- Boiling Point/Range : > 100 °C (1,013 hPa)
- Color : Colorless
- Density : 1.080 g/cm3 (20 °C)
- Solubility in Water : Completely miscible
- Physical Form : Liquid
- Ignition Temperature : Not applicable
- Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Chemical Stability : Stable under normal conditions.
- Corrosivity : Corrosive to metals
- Thermal Decomposition : No decomposition if used as directed.
- Packing Group : II
- Chemical Class : 8
- UN Number : 3264
- Harmonized System Code : 38249996
