Sputtering Targets and Coil Sets
Tantalum (Ta) Coilset
A full range of 200mm and 300mm coil sets in Tantalum (Ta) are available in a variety of configurations, purity and surface treatments
Overview
Sales Sheet
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
application/pdf 426.48 KB
10/31/2023
426.48 KB
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
426.48 KB
10/31/2023
426.48 KB
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
426.48 KB
10/31/2023
