Spin-on Glass (SOG)
ACCUGLASS® P112LS
Spin-on Glass (SOG) Series P-TTY
Overview
The ACCUGLASS P-TTY Spin-on Glass (SOG) Series (κ = 4.1-4.3) is a family of phosphosilicate polymers used for metal and poly planarization, overcoat passivation and non-etchback interlayer dielectric in the manufacture of integrated circuits.
Others
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PMD-BPSG planarization
application/pdf 579.19 KB
10/31/2023
579.19 KB
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