The ACCUGLASS P-5S (κ=4.7) Spin-on Glass (SOG) is a phosphosilicate polymer used for metal and poly planarization, overcoat passivation, and non-etchback interlayer dielectric in the manufacture of integrated circuits. The ACCUGLASS P-5S series also provides Na+ gettering ability similar to P-doped CVD oxides.ACCUGLASS P-5S series contains 2.7 wt% phosphorous bonded to O atoms in the Si-O backbone. The specific formulation results in a stable dielectric constant, <2% within wafer uniformity, and can be densified at temperatures up to 700-900˚C with no significant loss of phosphorous.Thin films of ACCUGLASS P-5S are applied using a commercial coater and cured in a vertical or horizontal furnace to thicknesses up to 1490Å (single coat) and 8000Å (multiple coats).
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