The ACCUSPIN B-XXX Spin-on dopant series are borosilicate (B-30, B-40, B-60) and boron nitrogen (B-75X, B-150) polymers designed for p-type base, isolation, p-type emitter diffusion, diode and deep p junction diffusion. The B-XXX series has been in large volume IC production for over 25 years. B-XXX can be applied using standard spin coaters.ACCUSPIN B-XXX materials provide a lower cost of ownership than other dopant sources and reduce the need for costly diffusion furnace tube cleaning or replacement, required when using gas or liquid boron dopants.Because the B-XXX materials are Spin-on borosilicates or boron nitrogen, diffusion is more uniform during the drive-in process so sheet resistance and junction depths are repeatable. The use of a Spin-on process eliminates non-uniformity issues due to changes in gas flows of boron sources and differing boron sheet resistance from placement in the diffusion furnace.A Spin-on process also increases diffusion furnace throughput because every wafer boat slot can be used for production wafers.
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