/content/advancedmaterials/pl/en/search-results.html
Outage Notification: This website will undergo a planned maintenance outage on Saturday, June 5, from 12:30-2:30 p.m. EDT (6:30-8:30 p.m. UDT). We regret any inconvenience this may cause.

Sputtering Targets and Coil Sets

Tantalum (Ta) Coilset

A full range of 200mm and 300mm coil sets in Tantalum (Ta) are available in a variety of configurations, purity and surface treatments

Overview
Sales Sheet
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
application/pdf 426.48 KB
10/31/2023
426.48 KB
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
application/pdf 426.48 KB
10/31/2023
426.48 KB
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
426.48 KB
10/31/2023