Sputtering Targets and Coil Sets
Copper (Cu) Coilset
A full range of 200mm and 300mm coil sets in Copper (Cu), are available in a variety of configurations, purity and surface treatments
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Overview
Sales Sheet
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
application/pdf 426.48 KB
10/31/2023
426.48 KB
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
application/pdf 426.48 KB
10/31/2023
426.48 KB
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
426.48 KB
10/31/2023