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Cleaning Chemistries
PGMEA-Thinner (17029)
ULSI Puranal
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Overview
Specifications
General Information
- Application
- Wafer fabrication
- CAS Number
- 108-65-6
- Grade
- ULSI
- Synonyms
- Propylene glycol methyl ether acetate
Physical Properties
- Boiling Point/Range
- 145 °C (1,013 hPa)
- Color
- Colorless
- Density
- 0.97 g/cm3 (20 °C)
- Flashpoint
- 45 °C
- Melting Point/Range
- -66 °C (1,013 hPa)
- Odor
- Ether-Like
- Partition Coefficient
- 0.43
- pH
- No data available
- Physical Form
- Liquid
- Solubility
- Soluble in most organic solvents
- Solubility in Water
- 20 °C
- Vapor Pressure
- 3.6 hPa (20 °C) hectopascal
Safety Information
- Chemical Stability
- Flammable liquid and vapor
- Corrosivity
- Not corrosive to metals
- Flammability
- Not applicable
- Ignition Temperature
- 333 °C
- Incompatible Materials
- Plastic materials can be attacked, Strong oxidizing agents
- Self Ignition
- Not auto-flammable
- Thermal Decomposition
- At normal pressure may be distilled without decomposition.
International Transportation
- Chemical Class
- 3
- Harmonized System Code
- 29153900
- Packing Group
- III
- UN Number
- 1993
General Information
- Application
- Wafer fabrication
- CAS Number
- 108-65-6
- Grade
- ULSI
- Synonyms
- Propylene glycol methyl ether acetate
Physical Properties
- Boiling Point/Range
- 145 °C (1,013 hPa)
- Color
- Colorless
- Density
- 0.97 g/cm3 (20 °C)
- Flashpoint
- 45 °C
- Melting Point/Range
- -66 °C (1,013 hPa)
- Odor
- Ether-Like
- Partition Coefficient
- 0.43
- pH
- No data available
- Physical Form
- Liquid
- Solubility
- Soluble in most organic solvents
- Solubility in Water
- 20 °C
- Vapor Pressure
- 3.6 hPa (20 °C) hectopascal
Safety Information
- Chemical Stability
- Flammable liquid and vapor
- Corrosivity
- Not corrosive to metals
- Flammability
- Not applicable
- Ignition Temperature
- 333 °C
- Incompatible Materials
- Plastic materials can be attacked, Strong oxidizing agents
- Self Ignition
- Not auto-flammable
- Thermal Decomposition
- At normal pressure may be distilled without decomposition.
International Transportation
- Chemical Class
- 3
- Harmonized System Code
- 29153900
- Packing Group
- III
- UN Number
- 1993
- Grade : ULSI
- Application : Wafer fabrication
- CAS Number : 108-65-6
- Synonyms : Propylene glycol methyl ether acetate
- Solubility : Soluble in most organic solvents
- pH : No data available
- Odor : Ether-Like
- Density : 0.97 g/cm3 (20 °C)
- Melting Point/Range : -66 °C (1,013 hPa)
- Vapor Pressure : 3.6 hPa (20 °C) hectopascal
- Physical Form : Liquid
- Flashpoint : 45 °C
- Solubility in Water : 20 °C
- Color : Colorless
- Boiling Point/Range : 145 °C (1,013 hPa)
- Partition Coefficient : 0.43
- Flammability : Not applicable
- Corrosivity : Not corrosive to metals
- Thermal Decomposition : At normal pressure may be distilled without decomposition.
- Self Ignition : Not auto-flammable
- Incompatible Materials : Plastic materials can be attacked, Strong oxidizing agents
- Ignition Temperature : 333 °C
- Chemical Stability : Flammable liquid and vapor
- UN Number : 1993
- Packing Group : III
- Chemical Class : 3
- Harmonized System Code : 29153900