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Buffered Oxide Etchants

Ammonium Fluoride Etching Mixture (17053)

AF 90-10 ULSI Puranal

Overview
Specifications

General Information

  • Application
    • Buffered Oxide Etchants
  • CAS Number
    • 12125-01-8
  • Grade
    • ULSI
  • Synonyms
    • Ammonium fluorure
    • Etchant

Physical Properties

  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.115 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Stinging
  • pH
    • Acidic
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • UN Number
    • 3264

General Information

  • Application
    • Buffered Oxide Etchants
  • CAS Number
    • 12125-01-8
  • Grade
    • ULSI
  • Synonyms
    • Ammonium fluorure
    • Etchant

Physical Properties

  • Boiling Point/Range
    • > 100 °C (1,013 hPa)
  • Color
    • Colorless
  • Density
    • 1.115 g/cm3 (20 °C)
  • Flashpoint
    • Not applicable
  • Melting Point/Range
    • No data available
  • Odor
    • Stinging
  • pH
    • Acidic
  • Physical Form
    • Liquid
  • Solubility in Water
    • Completely miscible

Safety Information

  • Chemical Stability
    • Stable under normal conditions.
  • Corrosivity
    • Corrosive to metals
  • Ignition Temperature
    • Not applicable
  • Incompatible Materials
    • Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Thermal Decomposition
    • No decomposition if used as directed.

International Transportation

  • Chemical Class
    • 8
  • Harmonized System Code
    • 38249996
  • Packing Group
    • II
  • UN Number
    • 3264
  • Synonyms : Ammonium fluorure|Etchant
  • Grade : ULSI
  • Application : Buffered Oxide Etchants
  • CAS Number : 12125-01-8
  • Boiling Point/Range : > 100 °C (1,013 hPa)
  • Density : 1.115 g/cm3 (20 °C)
  • Color : Colorless
  • Melting Point/Range : No data available
  • Odor : Stinging
  • Physical Form : Liquid
  • Flashpoint : Not applicable
  • Solubility in Water : Completely miscible
  • pH : Acidic
  • Incompatible Materials : Glass and silicate-containing materials are attacked, Contact with strong acids liberates hydrogen fluoride, Corrosive in contact with metal
  • Ignition Temperature : Not applicable
  • Corrosivity : Corrosive to metals
  • Thermal Decomposition : No decomposition if used as directed.
  • Chemical Stability : Stable under normal conditions.
  • Harmonized System Code : 38249996
  • Chemical Class : 8
  • UN Number : 3264
  • Packing Group : II