Hexamethyldisilazane
Hexamethyldisilazane (17713)
Puranal
Please sign in to access more documents
Once signed in, you may be able to access additional documents for your account.
Overview
Specifications
General Information
- Application
- Buffered Oxide Etchants
- CAS Number
- 999-97-3
- Grade
- SemEG
- Synonyms
- Bis(trimethylsilyl)amine
- HMDS
Physical Properties
- Boiling Point/Range
- 126 °C (1,013 hPa)
- Color
- Colorless
- Density
- 0.770 to 0.775 g/cm3 (20 °C)
- Flashpoint
- 11 °C
- Melting Point/Range
- -80 °C
- Odor
- Amine-Like
- Partition Coefficient
- No data available
- pH
- Not applicable
- Physical Form
- Liquid
- Solubility in Water
- Reacts violently with water.
- Vapor Pressure
- 100 hPa (50 °C) hectopascal
Safety Information
- Chemical Stability
- Stable under recommended storage conditions.
- Ignition Temperature
- 380 °C (1,013 hPa)
- Incompatible Materials
- Water, Incompatible with oxidizing agents, Acids
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 3
- Harmonized System Code
- 29319000
- Packing Group
- II
- Sub Class 1
- 6.1
- UN Number
- 3286
General Information
- Application
- Buffered Oxide Etchants
- CAS Number
- 999-97-3
- Grade
- SemEG
- Synonyms
- Bis(trimethylsilyl)amine
- HMDS
Physical Properties
- Boiling Point/Range
- 126 °C (1,013 hPa)
- Color
- Colorless
- Density
- 0.770 to 0.775 g/cm3 (20 °C)
- Flashpoint
- 11 °C
- Melting Point/Range
- -80 °C
- Odor
- Amine-Like
- Partition Coefficient
- No data available
- pH
- Not applicable
- Physical Form
- Liquid
- Solubility in Water
- Reacts violently with water.
- Vapor Pressure
- 100 hPa (50 °C) hectopascal
Safety Information
- Chemical Stability
- Stable under recommended storage conditions.
- Ignition Temperature
- 380 °C (1,013 hPa)
- Incompatible Materials
- Water, Incompatible with oxidizing agents, Acids
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 3
- Harmonized System Code
- 29319000
- Packing Group
- II
- Sub Class 1
- 6.1
- UN Number
- 3286
- Application : Buffered Oxide Etchants
- Grade : SemEG
- CAS Number : 999-97-3
- Synonyms : Bis(trimethylsilyl)amine|HMDS
- Flashpoint : 11 °C
- pH : Not applicable
- Melting Point/Range : -80 °C
- Density : 0.770 to 0.775 g/cm3 (20 °C)
- Vapor Pressure : 100 hPa (50 °C) hectopascal
- Solubility in Water : Reacts violently with water.
- Physical Form : Liquid
- Boiling Point/Range : 126 °C (1,013 hPa)
- Color : Colorless
- Partition Coefficient : No data available
- Odor : Amine-Like
- Incompatible Materials : Water, Incompatible with oxidizing agents, Acids
- Ignition Temperature : 380 °C (1,013 hPa)
- Chemical Stability : Stable under recommended storage conditions.
- Thermal Decomposition : No decomposition if used as directed.
- Sub Class 1 : 6.1
- UN Number : 3286
- Packing Group : II
- Chemical Class : 3
- Harmonized System Code : 29319000