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- Hexamethyldisilazane
Hexamethyldisilazane
Hexamethyldisilazane (CAS 999-97-3), also known as Bis(trimethylsilyl)amine and abbreviated as HMDS, is an colorless organosilicon compound with the chemical formula [(CH3)3Si]2NH. Browse our semiconductor grade Puranal™ products.
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