Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (21470)
AF 95-5 (20:1) ULSI
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Overview
Specifications
General Information
- Grade
- ULSI
- Synonyms
- Ammonium fluorure
- Etchant
Physical Properties
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.110 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Odorless
- pH
- Acidic
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
International Transportation
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- Sub Class 1
- 6.1
- UN Number
- 2922
General Information
- Grade
- ULSI
- Synonyms
- Ammonium fluorure
- Etchant
Physical Properties
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.110 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Odorless
- pH
- Acidic
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Corrosivity
- Corrosive to metals
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
International Transportation
- Chemical Class
- 8
- Harmonized System Code
- 38249996
- Packing Group
- II
- Sub Class 1
- 6.1
- UN Number
- 2922
- Grade : ULSI
- Synonyms : Ammonium fluorure|Etchant
- Physical Form : Liquid
- Boiling Point/Range : 100 °C (1,013 hPa)
- pH : Acidic
- Melting Point/Range : No data available
- Density : 1.110 g/cm3 (20 °C)
- Color : Colorless
- Odor : Odorless
- Solubility in Water : Completely miscible
- Flashpoint : Not applicable
- Chemical Stability : Stable under normal conditions.
- Ignition Temperature : Not applicable
- Corrosivity : Corrosive to metals
- Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Harmonized System Code : 38249996
- Chemical Class : 8
- Sub Class 1 : 6.1
- Packing Group : II
- UN Number : 2922