Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture FWA (17270)
486-56-458 VLSI Puranal
Overview
Specifications
General Information
- Grade
- VLSI
Physical Properties
- Boiling Point/Range
- 100 °C
- Color
- Colorless
- Density
- 1.13 g/cm3 (20 °C)
- Flashpoint
- Does not flash
- pH
- 2.8 (20 °C) undiluted
- Odor
- Odorless
- Physical Form
- Liquid
Safety Information
- Incompatible Materials
- Keep away from metals, Glass and silicate-containing materials are attacked
- Corrosivity
- Corrosive to metals
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 8
- Packing Group
- II
- Sub Class 1
- 6.1
- UN Number
- 2922
- Harmonized System Code
- 38249996
General Information
- Grade
- VLSI
Physical Properties
- Boiling Point/Range
- 100 °C
- Color
- Colorless
- Density
- 1.13 g/cm3 (20 °C)
- Flashpoint
- Does not flash
- pH
- 2.8 (20 °C) undiluted
- Odor
- Odorless
- Physical Form
- Liquid
Safety Information
- Incompatible Materials
- Keep away from metals, Glass and silicate-containing materials are attacked
- Corrosivity
- Corrosive to metals
- Thermal Decomposition
- No decomposition if used as directed.
International Transportation
- Chemical Class
- 8
- Packing Group
- II
- Sub Class 1
- 6.1
- UN Number
- 2922
- Harmonized System Code
- 38249996
- Grade : VLSI
- Boiling Point/Range : 100 °C
- Color : Colorless
- Density : 1.13 g/cm3 (20 °C)
- Flashpoint : Does not flash
- pH : 2.8 (20 °C) undiluted
- Odor : Odorless
- Physical Form : Liquid
- Incompatible Materials : Keep away from metals, Glass and silicate-containing materials are attacked
- Corrosivity : Corrosive to metals
- Thermal Decomposition : No decomposition if used as directed.
- Chemical Class : 8
- Packing Group : II
- Sub Class 1 : 6.1
- UN Number : 2922
- Harmonized System Code : 38249996
Property
Value
assay hydrofluoric acid (HF)
24.5 - 25.5 %
ammonium fluoride (NH4F)
17.6 - 18.4 %
silver (Ag)
Max. 0.01 ppm
aluminium (Al)
Max. 0.1 ppm
arsenic (As)
Max. 0.02 ppm
gold (Au)
Max. 0.01 ppm
boron (B)
Max. 0.02 ppm
barium (Ba)
Max. 0.02 ppm
beryllium (Be)
Max. 0.01 ppm
bismuth (Bi)
Max. 0.02 ppm
calcium (Ca)
Max. 0.2 ppm
cadmium (Cd)
Max. 0.01 ppm
cobalt (Co)
Max. 0.01 ppm
chromium (Cr)
Max. 0.05 ppm
copper (Cu)
Max. 0.02 ppm
iron (Fe)
Max. 0.3 ppm
gallium (Ga)
Max. 0.01 ppm
potassium (K)
Max. 0.05 ppm
lithium (Li)
Max. 0.01 ppm
magnesium (Mg)
Max. 0.05 ppm
manganese (Mn)
Max. 0.02 ppm
molybdenum (Mo)
Max. 0.01 ppm
sodium (Na)
Max. 0.1 ppm
nickel (Ni)
Max. 0.02 ppm
lead (Pb)
Max. 0.05 ppm
antimony (Sb)
Max. 0.01 ppm
tin (Sn)
Max. 0.02 ppm
strontium (Sr)
Max. 0.01 ppm
titanium (Ti)
Max. 0.01 ppm
thallium (Tl)
Max. 0.01 ppm
vanadium (V)
Max. 0.01 ppm
zinc (Zn)
Max. 0.05 ppm
zirconium (Zr)
Max. 0.01 ppm
